Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695566 | Apparatus and method for plasma-processing | Masaki Suzuki, Shoji Fukui, Shigeyuki Yamamoto, Yasuo Tanaka | 1997-12-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695566 | Apparatus and method for plasma-processing | Masaki Suzuki, Shoji Fukui, Shigeyuki Yamamoto, Yasuo Tanaka | 1997-12-09 |