Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695566 | Apparatus and method for plasma-processing | Masaki Suzuki, Shoji Fukui, Yuji Tsutsui, Yasuo Tanaka | 1997-12-09 |
| 5604380 | Semiconductor device having a multilayer interconnection structure | Hiroyuki Nishimura, Hiroshi Adachi, Etsushi Adachi, Shintaro Minami, Shigeru Harada +2 more | 1997-02-18 |
| 5600151 | Semiconductor device comprising a semiconductor substrate, an element formed thereon, and a stress-buffering film made of a silicone ladder resin | Etsushi Adachi, Hisoshi Adachi, Hiroyuki Nishimura, Shintaro Minami, Tooru Tazima +1 more | 1997-02-04 |