Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695566 | Apparatus and method for plasma-processing | Shoji Fukui, Yuji Tsutsui, Shigeyuki Yamamoto, Yasuo Tanaka | 1997-12-09 |
| 5636963 | Method of handling wafers in a vacuum processing apparatus | Hideo Haraguchi, Toshimichi Ishida | 1997-06-10 |
| 5609690 | Vacuum plasma processing apparatus and method | Syouzou Watanabe, Ichiro Nakayama, Tomohiro Okumura | 1997-03-11 |