Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5662743 | Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds | Masami Nakano, Isao Uchiyama, Hiroyuki Takamatsu | 1997-09-02 |
| 5640238 | Method of inspecting particles on wafers | Masami Nakano, Isao Uchiyama, Hiroyuki Takamatsu | 1997-06-17 |