Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665168 | Method for cleaning semiconductor silicon wafer | Masami Nakano, Hiroyuki Takamatsu | 1997-09-09 |
| 5662743 | Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds | Masami Nakano, Hiroyuki Takamatsu, Morie Suzuki | 1997-09-02 |
| 5640238 | Method of inspecting particles on wafers | Masami Nakano, Hiroyuki Takamatsu, Morie Suzuki | 1997-06-17 |
| 5626681 | Method of cleaning semiconductor wafers | Masami Nakano, Hiroyuki Takamatsu | 1997-05-06 |
| 5595412 | Device for handling wafers | Hideo Kudo | 1997-01-21 |