Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665168 | Method for cleaning semiconductor silicon wafer | Masami Nakano, Isao Uchiyama | 1997-09-09 |
| 5662743 | Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds | Masami Nakano, Isao Uchiyama, Morie Suzuki | 1997-09-02 |
| 5640238 | Method of inspecting particles on wafers | Masami Nakano, Isao Uchiyama, Morie Suzuki | 1997-06-17 |
| 5626681 | Method of cleaning semiconductor wafers | Masami Nakano, Isao Uchiyama | 1997-05-06 |
| 5623143 | Photo sensor having sectioned lens | — | 1997-04-22 |
| 5619326 | Method of sample valuation based on the measurement of photothermal displacement | Tsutomu Morimoto, Shingo Sumie, Naoyuki Yoshida | 1997-04-08 |
| 5591966 | Photosensor package with defined locations for lens supporting lead | Yoshio Harada, Toshiyasu Shimada, Takanori Yamashita | 1997-01-07 |