Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695268 | Light source apparatus | — | 1997-12-09 |
| 5680207 | Defect inspecting apparatus and defect inspecting method | — | 1997-10-21 |
| 5646725 | Foreign matter inspection apparatus for large-scale substrate | — | 1997-07-08 |
| 5629768 | Defect inspecting apparatus | — | 1997-05-13 |
| 5623340 | Foreign particle inspection apparatus | Kenji Yamamoto, Fuminori Hayano, Hideyuki Tashiro | 1997-04-22 |