Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663569 | Defect inspection method and apparatus, and defect display method | — | 1997-09-02 |
| 5623340 | Foreign particle inspection apparatus | Kenji Yamamoto, Tsuneyuki Hagiwara, Hideyuki Tashiro | 1997-04-22 |