Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5623340 | Foreign particle inspection apparatus | Kenji Yamamoto, Fuminori Hayano, Tsuneyuki Hagiwara | 1997-04-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5623340 | Foreign particle inspection apparatus | Kenji Yamamoto, Fuminori Hayano, Tsuneyuki Hagiwara | 1997-04-22 |