Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5699183 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Seishi Fujiwara, Hiroki Jinbo, Jun Takano, Norio Komine +1 more | 1997-12-16 |