Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702495 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Kazuhiro Nakagawa, Jun Takano, Seishi Fujiwara | 1997-12-30 |
| 5703712 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Seishi Fujiwara, Hiroyuki Hiraiwa | 1997-12-30 |
| 5699183 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Seishi Fujiwara, Jun Takano, Norio Komine, Kazuhiro Nakagawa +1 more | 1997-12-16 |
| 5696624 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Seishi Fujiwara, Hiroyuki Hiraiwa | 1997-12-09 |