Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702495 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Kazuhiro Nakagawa, Hiroki Jinbo, Jun Takano | 1997-12-30 |
| 5703712 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Hiroki Jinbo, Hiroyuki Hiraiwa | 1997-12-30 |
| 5699183 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Hiroyuki Hiraiwa, Hiroki Jinbo, Jun Takano, Norio Komine, Kazuhiro Nakagawa +1 more | 1997-12-16 |
| 5696624 | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production | Norio Komine, Hiroki Jinbo, Hiroyuki Hiraiwa | 1997-12-09 |
| 5679125 | Method for producing silica glass for use with light in a vacuum ultraviolet wavelength range | Hiroyuki Hiraiwa, Norio Komine | 1997-10-21 |