Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688382 | Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate | Matthew Besen, Lawrence P. Bourget, Donald K. Smith, Richard S. Post | 1997-11-18 |
| 5625259 | Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube | Donald K. Smith, Matthew Besen, Matthew P. Fitzner, Eric Georgelis | 1997-04-29 |