Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688382 | Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate | Matthew Besen, Lawrence P. Bourget, William M. Holber, Richard S. Post | 1997-11-18 |
| 5637279 | Ozone and other reactive gas generator cell and system | Matthew Besen | 1997-06-10 |
| 5625259 | Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube | William M. Holber, Matthew Besen, Matthew P. Fitzner, Eric Georgelis | 1997-04-29 |
| 5621331 | Automatic impedance matching apparatus and method | Brian McVey, Richard A. Rameriz | 1997-04-15 |