Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688382 | Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate | Matthew Besen, Lawrence P. Bourget, William M. Holber, Donald K. Smith | 1997-11-18 |