Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698070 | Method of etching film formed on semiconductor wafer | Yoshifumi Tahara, Hiroshi Nishikawa, Isahiro Hasegawa, Keiji Horioka | 1997-12-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698070 | Method of etching film formed on semiconductor wafer | Yoshifumi Tahara, Hiroshi Nishikawa, Isahiro Hasegawa, Keiji Horioka | 1997-12-16 |