Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668045 | Process for stripping outer edge of BESOI wafers | David Golland, Robert A. Craven | 1997-09-16 |
| 5626159 | Apparatus for cleaning semiconductor wafers | Henry F. Erk, Eugene R. Hollander, Jing Chai | 1997-05-06 |
| 5593505 | Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface | Henry F. Erk, Eugene R. Hollander, Jing Chai | 1997-01-14 |