Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5626159 | Apparatus for cleaning semiconductor wafers | Henry F. Erk, Ronald D. Bartram, Eugene R. Hollander | 1997-05-06 |
| 5593505 | Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface | Henry F. Erk, Ronald D. Bartram, Eugene R. Hollander | 1997-01-14 |