Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639519 | Method for igniting low pressure inductively coupled plasma | Roger Patrick, Philippe Schoenborn, Frank Bose | 1997-06-17 |
| 5624304 | Techniques for assembling polishing pads for chemi-mechanical polishing of silicon wafers | Nicholas F. Pasch, Thomas G. Mallon | 1997-04-29 |