Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639519 | Method for igniting low pressure inductively coupled plasma | Philippe Schoenborn, Mark Franklin, Frank Bose | 1997-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639519 | Method for igniting low pressure inductively coupled plasma | Philippe Schoenborn, Mark Franklin, Frank Bose | 1997-06-17 |