Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5608526 | Focused beam spectroscopic ellipsometry method and system | Timothy R. Piwonka-Corle, Karen Scoffone, Xing Chen, Lloyd J. LaComb, JR., Jean-Louis Stehle +1 more | 1997-03-04 |