Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698362 | 1,2 quinone diazide photosensitive resin composition containing select additive and method for forming a photoresist pattern | Mineo Nishi, Koji Nakano, Makoto Ikemoto, Yasuhiro Kawase | 1997-12-16 |