Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650631 | Electron beam writing system | Yasunari Sohda, Masahide Okumura, Yasuhiro Someda, Hidetoshi Satoh, Norio Saitou | 1997-07-22 |
| 5601686 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more | 1997-02-11 |