Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685684 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou +1 more | 1997-11-11 |
| 5646489 | Plasma generator with mode restricting means | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami +2 more | 1997-07-08 |