Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685684 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Tsunehiko Tsubone, Kenji Nakata +1 more | 1997-11-11 |
| 5673750 | Vacuum processing method and apparatus | Tsunehiko Tsubone, Naoyuki Tamura, Shigekazu Kato, Kouji Nishihata | 1997-10-07 |
| 5661913 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1997-09-02 |
| 5663884 | Multiprocessing apparatus | Kouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Tsunehiko Tsubone | 1997-09-02 |