Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661061 | Process for fabricating a semiconductor integrated circuit device having the multi-layered fin structure | Hirohisa Usuami, Kazuyuki Tsunokuni, Masayuki Kojima, Keiji Okamoto | 1997-08-26 |
| 5646489 | Plasma generator with mode restricting means | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Hiromichi Enami, Tetsunori Kaji +2 more | 1997-07-08 |