Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5646489 | Plasma generator with mode restricting means | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami +2 more | 1997-07-08 |
| 5607510 | Vacuum processing apparatus | Akitaka Makino, Naoyuki Tamura | 1997-03-04 |