Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689494 | Surface atom fabrication method and apparatus | Masakazu Ichikawa, Shigeyuki Hosoki, Fumihiko Uchida, Shigeo Kato, Yoshihisa Fujisaki +5 more | 1997-11-18 |
| 5627815 | Precision machining method precision machining apparatus and data storage apparatus using the same | Hajime Koyanagi, Sumio Hosaka | 1997-05-06 |
| 5604059 | Mask structure having phase shifting pattern suitable for forming fine pattern on photosensitive film and method of manufacturing solid-state devices using such mask structure | Yoshinori Hoshina, Kengo Asai, Mitsutaka Hikita, Atsushi Isobe, Ryo Suzuki +2 more | 1997-02-18 |