Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5604059 | Mask structure having phase shifting pattern suitable for forming fine pattern on photosensitive film and method of manufacturing solid-state devices using such mask structure | Ryo Imura, Kengo Asai, Mitsutaka Hikita, Atsushi Isobe, Ryo Suzuki +2 more | 1997-02-18 |