Motohiro Hirano

HI Hitachi: 1 patents #867 of 2,942Top 30%

HC Hitachi Tokyo Electronics Co.: 1 patents #1 of 8Top 15%

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%

TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%

Overall (1997): #100,882 of 185,788Top 55%

Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
5593540	Plasma etching system and plasma etching method	Kazushi Tomita, Yoshikazu Ito, Akira Nozawa, Hiromitsu Matsuo, Shunichi Iimuro +2 more	1997-01-14