HM

Hiromitsu Matsuo

HI Hitachi: 1 patents #867 of 2,942Top 30%
HC Hitachi Tokyo Electronics Co.: 1 patents #1 of 8Top 15%
TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
Overall (1997): #141,484 of 185,788Top 80%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5593540 Plasma etching system and plasma etching method Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Shunichi Iimuro +2 more 1997-01-14