KT

Kazushi Tomita

HI Hitachi: 1 patents #867 of 2,942Top 30%
HC Hitachi Tokyo Electronics Co.: 1 patents #1 of 8Top 15%
TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
📍 Kawaguchi, JP: #11 of 40 inventorsTop 30%
Overall (1997): #121,508 of 185,788Top 70%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5593540 Plasma etching system and plasma etching method Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Hiromitsu Matsuo, Shunichi Iimuro +2 more 1997-01-14