Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5631113 | Electron-beam exposure system for reduced distortion of electron beam spot | Takamasa Satoh, Hiroshi Yasuda, Akio Yamada, Yoshihisa Oae, Keiji Yamada +1 more | 1997-05-20 |
| 5614725 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1997-03-25 |
| 5610406 | Charged particle beam exposure method and apparatus | Mitsuhiro Nakano | 1997-03-11 |