Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5631113 | Electron-beam exposure system for reduced distortion of electron beam spot | Takamasa Satoh, Hiroshi Yasuda, Akio Yamada, Junichi Kai, Yoshihisa Oae +1 more | 1997-05-20 |