Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614725 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 1997-03-25 |
SA
Soichiro Arai
Overall (1997): #76,602 of 185,788Top 45%
1
Patents 1997