Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652297 | Aqueous antireflective coatings for photoresist compositions | Iain McCulloch, Ralph R. Dammel, Dana L. Durham, Ming Kang, Dinesh N. Khanna +1 more | 1997-07-29 |
| 5652317 | Antireflective coatings for photoresist compositions | Iain McCulloch, Ralph R. Dammel, Dana L. Durham | 1997-07-29 |
| 5612164 | Positive photoresist composition comprising a mixed ester of trishydroxyphenyl ethane and a mixed ester of trihydroxybenzophenone | Anthony Canize, Stanley A. Ficner, Walter Spiess | 1997-03-18 |