TS

Takanori Sakurai

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
Overall (1997): #71,039 of 185,788Top 40%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5625526 Electrostatic chuck Masahide Watanabe, Masami Kubota, Shiro Koyama, Kenji Ishikawa, Kouichi Kazama +1 more 1997-04-29