Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5676765 | Pin junction photovoltaic device having a multi-layered I-type semiconductor layer with a specific non-single crystal I-type layer formed by a microwave plasma CVD process | Keishi Saito, Hiroshi Shimoda, Yusuke Miyamoto | 1997-10-14 |
| 5637358 | Microwave plasma chemical vapor deposition process using a microwave window and movable, dielectric sheet | Hirokazu Otoshi, Keishi Saitoh, Ryuji Okamura | 1997-06-10 |