Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637358 | Microwave plasma chemical vapor deposition process using a microwave window and movable, dielectric sheet | Hirokazu Otoshi, Ryuji Okamura, Koichi Matsuda | 1997-06-10 |
| 5635408 | Method of producing a semiconductor device | Masafumi Sano | 1997-06-03 |