Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637358 | Microwave plasma chemical vapor deposition process using a microwave window and movable, dielectric sheet | Keishi Saitoh, Ryuji Okamura, Koichi Matsuda | 1997-06-10 |
| 5597623 | Process for using microwave plasma CVD | Yasuyoshi Takai, Tetsuya Takei, Ryuji Okamura | 1997-01-28 |