Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681215 | Carrier head design for a chemical mechanical polishing apparatus | Michael Sherwood, Harry Q. Lee, Semyon Spektor | 1997-10-28 |
| 5643053 | Chemical mechanical polishing apparatus with improved polishing control | — | 1997-07-01 |