Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681215 | Carrier head design for a chemical mechanical polishing apparatus | Harry Q. Lee, Norm Shendon, Semyon Spektor | 1997-10-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681215 | Carrier head design for a chemical mechanical polishing apparatus | Harry Q. Lee, Norm Shendon, Semyon Spektor | 1997-10-28 |