Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681215 | Carrier head design for a chemical mechanical polishing apparatus | Michael Sherwood, Norm Shendon, Semyon Spektor | 1997-10-28 |
| 5599423 | Apparatus and method for simulating and optimizing a chemical mechanical polishing system | Norman W. Parker, Robert D. Tolles | 1997-02-04 |