Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5680013 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces | Charles Dornfest, John M. White, Craig Bercaw, Hiroyuki Steven Tomosawa | 1997-10-21 |
| 5633073 | Ceramic susceptor with embedded metal electrode and eutectic connection | David Cheung, Christopher T. Lane, Harold Mortensen | 1997-05-27 |