Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5680013 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces | Charles Dornfest, Craig Bercaw, Hiroyuki Steven Tomosawa, Mark Fodor | 1997-10-21 |
| 5674786 | Method of heating and cooling large area glass substrates | Norman L. Turner, David E. Berkstresser | 1997-10-07 |
| 5611865 | Alignment of a shadow frame and large flat substrates on a heated support | David E. Berkstresser, Carl T. Petersen | 1997-03-18 |
| 5607009 | Method of heating and cooling large area substrates and apparatus therefor | Norman L. Turner, David E. Berkstresser | 1997-03-04 |