Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5633073 | Ceramic susceptor with embedded metal electrode and eutectic connection | Mark Fodor, Christopher T. Lane, Harold Mortensen | 1997-05-27 |
| 5626678 | Non-conductive alignment member for uniform plasma processing of substrates | Turgut Sahin | 1997-05-06 |