Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658442 | Target and dark space shield for a physical vapor deposition system | Fernand Dorleans, Christopher Hagerty, Mark Cassidy Cridlin Lloyd, Howard H. Tang, Siyaun Yang +1 more | 1997-08-19 |
| 5650052 | Variable cell size collimator | Sergio Edelstein, Nitin Khurana, Keiji Miyamoto, Roderick C. Mosely, William J. Murphy +2 more | 1997-07-22 |