Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691876 | High temperature polyimide electrostatic chuck | Aihua Chen, Vijay D. Parkhe | 1997-11-25 |
| 5650052 | Variable cell size collimator | Nitin Khurana, Keiji Miyamoto, Roderick C. Mosely, William J. Murphy, Vijay D. Parkhe +2 more | 1997-07-22 |