Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691876 | High temperature polyimide electrostatic chuck | Vijay D. Parkhe, Sergio Edelstein | 1997-11-25 |
AC
Aihua Chen
Overall (1997): #180,278 of 185,788Top 100%
1
Patents 1997