Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658442 | Target and dark space shield for a physical vapor deposition system | James Van Gogh, Fernand Dorleans, Christopher Hagerty, Howard H. Tang, Siyaun Yang +1 more | 1997-08-19 |